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Determination Accuracy of Measurement in Nanometrology
Šrámek, Jan ; Číp, Ondřej (referee) ; Tykal, Miroslav (referee) ; Jankových, Róbert (advisor)
The presented doctoral thesis deals with measurements of extremely small sizes in nanometrology using a touch probe, which constitutes a part of a three-coordinate measuring system. It addresses a newly developed method of exact measurements in nanometrology by touch probes. The aim of this work was to expand the measurement options of this device and design a methodology proposal for the measurement of small parts, including the determination of accuracy of measurement of this device when used in nanometrology. The work includes the new methodology for the calculation of uncertainty of measurement, which constitutes a keystone in determining the accuracy of measurement of a accuracy three coordinate measuring system (hereinafter only nano-CMM). The first part of the doctoral thesis analyzes the present situation in the area of evaluation of accuracy of measurement in very accurate length measurements. It defines and describes individual methods implemented in the determination of accuracy of measurement on the instrument nano-CMM. A great emphasis is placed on the methodology of the measurement uncertainty, which draws from the author’s experience as a metrologist working in the laboratories of the Department of Primary nanometrology and technical length, Czech Metrology Institute Brno (hereinafter only CMI Brno). The second part of the doctoral thesis focuses on the determination of accuracy of length measurement in nanometrology, using a large set of measurements that were carried out under the reproducibility and repeatability conditions. There is also described and tested a model procedure utilizing the Monte Carlo method to simulate the measuring system nano-CMM in order to extent the newly created methodology of the measurement of uncertainty using a touch probe on the instrument nano-CMM. A substantial part of this doctoral thesis provides a detailed evaluation of results obtained from experiments that were executed under the repeatability and reproducibility conditions, especially for the purposes of the determination of the uncertainty of measurement. In this doctoral thesis, the uncertainty of measurement is chosen to quantify the accuracy of measurement of the instrument nano-CMM. The final part of this thesis summarizes the knowledge obtained during the scientific research and provides its evaluation. For the methodology used to determine the accuracy of measurement in nanometrology, it also outlines the future development in the area of scientific research, including the practical use in metrological traceability and extremely accurate measurements for customers. Furthermore, it deals with the possible use of other scanning systems compatible with the instrument nano-CMM.
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Determination Accuracy of Measurement in Nanometrology
Šrámek, Jan ; Číp, Ondřej (referee) ; Tykal, Miroslav (referee) ; Jankových, Róbert (advisor)
The presented doctoral thesis deals with measurements of extremely small sizes in nanometrology using a touch probe, which constitutes a part of a three-coordinate measuring system. It addresses a newly developed method of exact measurements in nanometrology by touch probes. The aim of this work was to expand the measurement options of this device and design a methodology proposal for the measurement of small parts, including the determination of accuracy of measurement of this device when used in nanometrology. The work includes the new methodology for the calculation of uncertainty of measurement, which constitutes a keystone in determining the accuracy of measurement of a accuracy three coordinate measuring system (hereinafter only nano-CMM). The first part of the doctoral thesis analyzes the present situation in the area of evaluation of accuracy of measurement in very accurate length measurements. It defines and describes individual methods implemented in the determination of accuracy of measurement on the instrument nano-CMM. A great emphasis is placed on the methodology of the measurement uncertainty, which draws from the author’s experience as a metrologist working in the laboratories of the Department of Primary nanometrology and technical length, Czech Metrology Institute Brno (hereinafter only CMI Brno). The second part of the doctoral thesis focuses on the determination of accuracy of length measurement in nanometrology, using a large set of measurements that were carried out under the reproducibility and repeatability conditions. There is also described and tested a model procedure utilizing the Monte Carlo method to simulate the measuring system nano-CMM in order to extent the newly created methodology of the measurement of uncertainty using a touch probe on the instrument nano-CMM. A substantial part of this doctoral thesis provides a detailed evaluation of results obtained from experiments that were executed under the repeatability and reproducibility conditions, especially for the purposes of the determination of the uncertainty of measurement. In this doctoral thesis, the uncertainty of measurement is chosen to quantify the accuracy of measurement of the instrument nano-CMM. The final part of this thesis summarizes the knowledge obtained during the scientific research and provides its evaluation. For the methodology used to determine the accuracy of measurement in nanometrology, it also outlines the future development in the area of scientific research, including the practical use in metrological traceability and extremely accurate measurements for customers. Furthermore, it deals with the possible use of other scanning systems compatible with the instrument nano-CMM.
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